Fundamentals of Semiconductor Fabrication

From crystal growth to integrated devices and circuits, this book offers a basic introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence.

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This book: offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence; presents comprehensive coverage of process sequences; introduces readers to modern simulation tools; addresses the practical aspects of integrated circuit fabrication; and, clearly explains basic processing theory.