Enabling Technologies for MEMS and Nanodevices
Wiley-VCH (Verlag)
978-3-527-30746-3 (ISBN)
- Titel ist leider vergriffen;
keine Neuauflage - Artikel merken
Henry Baltes is Professor Emeritus of ETH Zurich affiliated with Micro and Nanosystems at the Department of Mechanical and Process Engineering. He was Professor of Physical Electronics at ETH Zurich and Director of the Physical Electronics Laboratory (PEL) from 1988 to 2006. In 2004 and 2005 he acted as start-up Chair of the future Department of Biosystems Science and Engineering (D-BSSE) of ETH Zurich located at Basel. Henry Baltes is a Fellow of the IEEE and a Member of the Swiss Academy of Technical Sciences. He served on the Editorial Board of the Proceedings of the IEEE, the Search Committee of the Koerber Foundation, and the Advisory Committee of the Freiburg Institute of Advanced Sudies. He is a co-founder of the spin-off company SENSIRION.
MEMS TECHNOLOGIES AND APPLICATIONS
M3: The Third Dimension of Silicon
Trends in MEMS Commercialization
Capacitive Interfaces for MEMS
Packaging of Advanced Micro- and Nanosystems
High Frequency Integrated Micro-electromechanical Resonators and Filters
MEMS in Mass Storage Systems
Scanning Micro- and Nanoprobes for Electrochemical Imaging
NANODEVICE TECHNOLOGIES AND APPLICATIONS
Nanofluidic Simulations
Nanofluidics - Structures and Devices
Carbon Nanotubes and Sensors: a Review
CMOS-based DNA Sensor Arrays
"Overall, the book gives good insight into very recent technologies, developments, and practical applications in the MEMS field. I would recommend this book as supplementary reading for graduate students, but not as a class text since the book assumes the reader already has fundamental knowledge in this research field. The book is also a very useful source for professionals in related areas of materials science and mechanical and chemical engineering who want to become aware of emerging MEMS technologies."
Advanced Materials
"... an excellent book that gives a good overview and discussion of sensors and devices commonly found in the field of MEMS as well as more advanced devices..."
MRS Bulletin
Erscheint lt. Verlag | 24.6.2004 |
---|---|
Reihe/Serie | Advanced Micro and Nanosystems ; 1 |
Sprache | englisch |
Maße | 170 x 240 mm |
Gewicht | 960 g |
Themenwelt | Technik ► Elektrotechnik / Energietechnik |
Schlagworte | Analytical Chemistry • Analytische Chemie • Chemie • Chemistry • Control Systems Technology • Electrical & Electronics Engineering • Electrical & Electronics Engineering • Electronic materials • Electronic Packaging • Elektronik • Elektronikbauteile • Elektronische Materialien • Elektrotechnik u. Elektronik • Halbleiter • Industrial Chemistry • Materials Science • Materialwissenschaften • MEMS • Mikrostruktur • Mikrotechnik • Mustererkennung • Nanotechnologie • nanotechnology • Pattern Analysis • Regelungstechnik • Robotics • Robotik • semiconductors • Sensoren • Sensoren, Instrumente u. Messung • Sensor Materials • Sensors, Instrumentation & Measurement • Sensors, Instrumentation & Measurement • Technische u. Industrielle Chemie |
ISBN-10 | 3-527-30746-X / 352730746X |
ISBN-13 | 978-3-527-30746-3 / 9783527307463 |
Zustand | Neuware |
Haben Sie eine Frage zum Produkt? |
aus dem Bereich