Wafer Fabrication

Jie Zhang, Shanghai Jiaotong University, Shanghai, China

Table of content:
Chapter 1 Wafer fabrication system-semiconductor manufacturing, process, manufacturing system, machining system, dispatch
Chapter 2 Automatic Materiel Handling System (AMHS) in wafer fabrication-development, sub-systems, layout, features
Chapter 3 AMHS modeling-modeling based on network flow, queueing theory, Mathematical Programming model, Markov model, Simulation Model, Petri network model
Chapter 4 AMHS performance analysis-description of the running of AMHS, frequently-used analytical methods, extended Markov model, performance analysis based on extended Markov model
Chapter 5 AMHS dispatch-dispatch based on Heuristic Rules, operational research, intelligent algorithm
Chapter 6 Dispatch of Interbay handling system-methods, model, structure, dispatch based on Complex Heuristic Rules
Chapter 7 Dispatch of Intrabay handling system-dispatch based on GDP, Push-Pull theory
Chapter 8 Dispatch at system level-dispatch based on PMPGA, GARL Complex Heuristic Rules
Chapter 9 Performance and evaluation-system performance modeling, modeling based on AOKCTP, performance analysis, case studies