Handbook of Semiconductor Interconnection Technology

Describes the equipment used in manufacturing for deposition and etching, such as electrochemical deposition equipment used for plating copper. This book emphasizes the measurement of mechanical and thermal properties as well as the use of EELS, energy filtering TEM, and atomic force microscopy.

---

First introduced about a decade ago, the first edition of the Handbook of Semiconductor Interconnection Technology became widely popular for its thorough, integrated treatment of interconnect technologies and its forward-looking perspective. The field has grown tremendously in the interim and many of the "likely directions" outlined in the first edition are now standard in modern facilities. Reflecting those advances, this edition delves into the practical aspects of interconnections for manufacturing. It examines the interconnect and fabrication technologies now available, with an examination of future prospects for the field.

What's in this Edition:

Detailed discussion of electrochemical equipment for plating copper

Information on tools used for evaporation, chemical vapor deposition, and plasma processes

Emphasis on measurement of mechanical and thermal properties of insulators

Methods for characterizing porous dielectric thin films

Greater focus on integration issues and properties of titanium, cobalt, and nickel silicides

Process schemes based on the increased need for borderless contact gates and source/drain

Expanded discussion on choices for low-dielectric insulators

Concentration on electroplated copper, especially morphology of plated films and their properties

Developments in thin film liners and barriers

Expanded material on copper reliability