Shape and Functional Elements of the Bulk Silicon Microtechnique (eBook)

Preface 5
Table of Contents 6
Symbols 10
1 Introduction 12
2 Technological Basis of Bulk-Silicon- Microtechnique 15
2.1 The silicon wafer as a basis material of microtechnique 15
2.2 Technological processes 16
3 Orientation Dependent Etching of Silicon 27
3.1 Fundamental principles of the generation of shapes 27
3.2 Chemistry and techniques of wet silicon etching 47
3.3 Etch mask design and simulation of silicon etching 56
3.4 Basic processes of the bulk-silicon-microtechnique 62
4 General Overview of the Shape- and Functional Elements and the Procedure of their Design 80
4.1 Survey and methodical procedure 80
4.2 Guide for the design procedure 82
4.3 Legend of the sketches 82
5 Simple Shape Elements 84
5.1 Definitions of shapes by the combination of sidewalls 84
5.2 Qualities of etch ground and sidewall-faces and of the edges between them 95
5.3 Shape elements made by one-step etch processes 103
5.4 Shape elements made by two-step etch processes 123
6 Elements for Mechanical Applications 136
6.1 Spring elements 136
6.2 Levers / Spring hinges 152
6.3 Sliding guides 155
6.4 Bearings 158
7 Elements for Fluidic Applications 167
7.1 Channels 167
7.2 Alterations of cross section of channels 170
7.3 Elbows 171
7.4 Branchings (Mixers) 174
7.5 Caverns (Cavities) 177
7.6 Nozzles 179
8 Elements for Optical Applications 185
8.1 Grooves for fibre positioning 185
8.2 Micro mirrors 188
8.3 Beam Splitters 193
8.4 Concave Micro Mirrors 196
8.5 Gratings 197
8.6 Infrared Prisms 201
Appendix 207
Physical Properties of Silicon 208
Index 224