Nanotechnology and Nanoelectronics (eBook)

Preface 5
Contents 6
Contributors 10
Abbreviations 11
1 Historical Development 15
1.1 Miniaturization of Electrical and Electronic Devices 15
1.2 Moore’s Law and the SIA Roadmap 16
2 Quantum Mechanical Aspects 18
2.1 General Considerations 18
2.2 Simulation of the Properties of Molecular Clusters 18
2.3 Formation of the Energy Gap 20
2.4 Preliminary Considerations for Lithography 21
2.5 Confinement Effects 25
2.6 Evaluation and Future Prospects 27
3 Nanodefects 29
3.1 Generation and Forms of Nanodefects in Crystals 29
3.2 Characterization of Nanodefects in Crystals 30
3.3 Applications of Nanodefects in Crystals 40
3.4 Nuclear Track Nanodefects 47
3.5 Evaluation and Future Prospects 49
4 Nanolayers 51
4.1 Production of Nanolayers 51
4.2 Characterization of Nanolayers 75
4.3 Applications of Nanolayers 115
4.4 Evaluation and Future Prospects 115
5 Nanoparticles 118
5.1 Fabrication of Nanoparticles 118
5.2 Characterization of Nanoparticles 125
5.3 Applications of Nanoparticles 128
5.4 Evaluation and Future Prospects 129
6 Selected Solid States with Nanocrystalline Structures 131
6.1 Nanocrystalline Silicon 131
6.2 Zeolites and Nanoclusters in Zeolite Host Lattices 137
7 Nanostructuring 152
7.1 Nanopolishing of Diamond 152
7.2 Etching of Nanostructures 159
7.3 Lithography Procedures 163
7.4 Focused Ion Beams 181
7.5 Nanoimprinting 197
7.6 Atomic Force Microscopy 204
7.7 Near-Field Optics 205
8 Extension of Conventional Devices by Nanotechniques 209
8.1 MOS Transistors 209
8.2 Bipolar Transistors 219
9 Innovative Electronic Devices Based on Nanostructures 221
9.1 General Properties 221
9.2 Resonant Tunneling Diode 221
9.3 Quantum Cascade Laser 227
9.4 Single Electron Transistor 233
9.5 Carbon Nanotube Devices 240
References 246
1 Historic Development 246
2 Quantum Mechanical Aspects 246
3 Nanodefects 247
4 Nanolayers 249
5 Nanoparticles 251
6 Selected Solid States with Nanocrystalline Structures 252
7 Nanostructuring 257
8 Extension of Conventional Devices by Nanotechniques 261
9 Innovative Electronic Devices Based on Nanostructures 262
Index 268