Microchip Fabrication: A Practical Guide to Semiconductor Processing

Peter Van Zant is the Principal of Peter Van Zant Associates, a semiconductor manufacturing consulting and training company, and the author of all three previous editions of this widely read book. He has over 35 years in the semiconductor industry, working at IBM, Texas Instruments, and National Semiconductors. He resides in Grass Valley, California.

Chapter 1: The Semiconductor Industry. Chapter 2: Semiconductor Materials and Process Chemicals. Chapter 3: Manufacturing Wafers. Chapter 4: Overview of Wafer Fabrication. Chapter 5: Contamincation Control. Chapter 6: Process Yields. Chapter 7: Oxidation. Chapter 8: Basic Patterning - Surface Preparation to Exposure. Chapter 9: Basic Patterning - Developing to Final Inspection. Chapter 10: Advanced Photolithography Processes. Chapter 11: Doping. Chapter 12: Deposition. Chapter 13: Metallization. Chapter 14: Process and Device Evaluation. Chapter 15: The Business of Wafer Fabrication. Chapter 16: Semiconductor Devices and Integrated Circuit Formation. Chapter 17: Integrated Circuit Types. Chapter 18: Packaging. Index.