2D Materials–Based NEMS Sensors and Actuators

1. Introduction to 2D Materials-Based NEMS
1.1 Graphene
1.2 Transition Metal Dichalcogenide (TMD)

2. Nano Mechanics of 2D Materials
2.1 Mechanical Properties of 2D Materials
2.2 Bulge Test
2.3 Van der Waals Force
2.4 Pull in Concept
2.5 Contact Adhesion
2.6 Blister Test
2.7 Nanoindentation

3. NEMS Fabrication Technologies for 2D Materials

4. Characterization Techniques for 2D NEMS
4.1 Atomic Force Microscopy
4.2 Electron Microscopy Techniques
4.3 Raman Spectroscopy

5. Actuation and Sensing of Motion Techniques in 2D NEMS
5.1 Techniques for Actuation of Motion in 2D NEMS
5.1.1 Optical
5.1.2 Magnetomotive
5.1.3 Electrostatic (Capacitive)
5.1.4 Others
5.2 Sensing Techniques in 2D MEMS
5.2.1 Magnetomotive
5.2.2 Optical
5.2.3 Capacitive Displacement Detection
5.2.4 Piezoresistive and Piezoelectric Detection
5.2.5 Electron Tuning
5.2.6 Others

6. Graphene and TMD-Based NEMS Sensors
6.1. Introduction
6.2 Device Design
6.2.1 Graphene Mass and Temperature Sensors
6.2.2 Graphene Pressure Sensors
6.2.3 Graphene Gas Sensors
6.2.4 TMD-Based Sensors
6.3 Results and Discussions
6.4 Potential Applications
6.5 Conclusion

7. Graphene and TMD-Based NEMS Actuators
7.1. Introduction
7.2 Device Design
7.3 Modelling and Analysis
7.4 Deformation of Graphene Membranes by Van der Waals Force
7.5 Size Scaling
7.6 Results and Discussion
7.7 Potential Applications
7.8 Conclusion

8. Future Work in 2D NEMS
8.1 Summary of Accomplished Work
8.2 Future Work