Oxide Reliability: A Summary Of Silicon Oxide Wearout, Breakdown, And Reliability

A summary of our knowledge of oxide reliability, featuring articles written by experts in the field. It should be useful to reliability engineers and manufacturing engineers, helping them to produce and characterize reliable oxides. It can also be used as an introduction for new engineers.

---

This book presents in summary the state of our knowledge of oxide reliability. The articles have been written by experts who are among the most knowledgeable in the field. The book will be an invaluable aid to reliability engineers and manufacturing engineers, helping them to produce and characterize reliable oxides. It can be used as an introduction for new engineers interested in oxide reliability, besides being a reference for engineers already engaged in the field.