Proceedings of the 13th European Symposium on the Reliability of Electron Devices, Failure Physics and Analysis

These are the papers presented at the ESREF 2002. Two new topics in 2002 are optical devices and microelectromechanical systems (MEMS); both have attracted a high number of scientific contributions. The book contains nine invited papers and approximately 100 submitted contributions.

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These are the papers presented at the 13th European Symposium on the Reliability of Electron Devices, Failure Physics and Analysis (ESREF 2002), held in Italy, 7-11 Oct 2002. The Proceedings are being published concurrently as a special issue of "Microelectronics Reliability". Since its foundation in 1990, the annual ESREF symposium has been the premier European forum for the discussion of research in all aspects of specification, technology and manufacturing, test, control and analysis for microelectronic devices and circuits. Two new topics in 2002 are optical devices and microelectromechanical systems (MEMS); both have attracted a high number of scientific contributions.
The book contains nine invited papers and approximately 100 submitted contributions on the following topics: Quality and reliability techniques for components and system; failure mechanisms in silicon devices; failure mechanisms in compound semiconductors devices; non-volatile and programmable device reliability; power devices reliability; photonics reliability; packaging and assembly reliability; advanced failure analysis: defect detection and analysis; electron and optical beam testing (EOBT); electrostatic discharge (ESD) MEMS/MOEMS (Special Session).