Excimer Laser Technology (eBook)

Preface 5
Contents 7
List of Contributors 14
1 Introduction 19
1.1 Introductory Remarks 19
1.2 Historical Review of Excimer Laser Development 26
1.3 Trends in Worldwide Excimer Laser Sales 40
Fundamentals 48
2 Some Fundamentals of Laser Physics 49
2.1 The Wave-Particle Duality of Light 49
2.2 Electromagnetic Radiation 49
2.3 Spontaneous and Stimulated Emission, Population Inversion 50
2.4 Design Principle of a Laser 53
2.5 Types of Lasers 54
References 56
3 Principles of Excimer Lasers 57
References 61
4 Design and Technology of Excimer Lasers 62
4.1 Excitation 62
4.2 Preionization 64
4.3 Discharge Electrodes 66
4.4 Discharge Circuits 67
4.5 Power Supplies 73
4.6 Circulation, Laser Gas Cooling, and Cleaning 77
4.7 Safety Standards for Industrial Excimer Lasers 79
References 88
5 Specially Designed Excimer Lasers 89
5.1 High-Repetition-Rate and High-Power Lasers 89
References 93
5.2 High-Energy Lasers 95
References 102
6 Excimer Lasers for Microlithography 103
6.1 Motivation 103
6.2 Wavelengths 106
6.3 Spectral Output 108
6.4 Line Narrowing 108
6.5 Wavelength Control 109
6.6 Laser Power and Energy 112
6.7 Energy Dose Control 112
6.8 Dual-Chamber Lasers 113
6.9 Pulse Length 115
6.10 Outlook 116
References 117
7 Laser Beam Characterization 118
7.1 Introduction 118
7.2 Recording of Spatial Beam Profiles 118
7.3 Evaluation of Beam Parameters 120
7.4 Wavefront Measurement 127
References 129
8 Optical Coatings for Excimer Laser Applications 131
8.1 Introduction 131
8.2 Basics 131
8.3 Interaction Mechanisms of UV Photons with Coated Optical Elements 132
8.4 Absorption 133
8.5 Coatings 134
8.6 XUV Coatings 136
8.7 Summary 138
References 138
9 Small Structures with Large Excimer Lasers 139
9.1 Introduction 139
9.2 Nozzle Plates for Ink Jet Printers 139
9.3 Attenuators 140
9.4 Homogenizers 142
9.5 Projection Lenses 144
9.6 Mechanically and Thermally Stable Support System 145
9.7 Beam Diagnostics 145
9.8 Summary and Outlook 147
References 147
Applications 149
10 Overview 150
References 156
11 Ablative Micro-Fabrication 159
11.1 Ablation 159
References 163
11.2 Micro-Machining 165
References 194
11.3 Via Drilling 197
References 209
12 Micro-Processing of Borosilicate Glass and Polymers 211
12.1 Borosilicate Glass 211
12.2 Polymers 222
References 229
13 F2- Laser Microfabrication for Photonics and Biophotonics 230
13.1 Introduction 230
13.2 Vacuum-Ultraviolet Optical Tools 231
13.3 Micromachining of Silica Glasses 237
13.4 Micro-Optics Fabrication 243
13.5 Controlling Refractive Index 262
13.6 Biophotonics on a Chip 277
References 281
14 Nano-Structuring with Femtosecond Excimer Laser Pulses 287
14.1 Introduction 287
14.2 The Laser System 288
14.3 Mask Projection 289
14.4 Interference Techniques 289
References 291
15 Physical Aspects of Ultra- Fast UV Laser Transfer 292
15.1 Introduction to the Laser Transfer Process 292
15.2 Visualization of the Laser Materials Transfer 294
References 301
16 Material Modification 302
16.1 Microlithography 302
16.2 TFT Annealing 313
16.3 Fiber Bragg Gratings 320
16.4 Marking 328
16.5 Activation and Metallization of Dielectrics 338
References 340
17 Excimer-Laser Assisted Deposition of Carbon and Boron Nitride- Based High- Temperature Superconducting Films 341
17.1 Introduction 341
17.2 Characteristics of Excimer Laser Ablation 342
17.3 Deposition Techniques 346
17.4 Deposition and Properties of Tetrahedral Amorphous Carbon (ta-C) Films 347
17.5 Deposition and Properties of Cubic Boron Nitride ( c-BN) Films 352
17.6 Summary and Outlook 355
References 356
18 Combustion Analysis 357
18.1 Scattering Methods 358
18.2 Fluorescence Methods 362
References 366
19 Medical Applications of Excimer Lasers 367
19.1 Refractive Laser Surgery 367
19.2 Glaucoma Surgery 373
19.3 Laser Angioplasty 375
19.4 XeCl Excimer Laser Treatment of Psoriasis 376
References 376
20 High-Intensity Applications of Excimer Lasers 378
20.1 Introduction 378
20.2 Precis of Experimental Findings 378
20.3 Conclusions 386
References 387
21 High-Repetition-Rate Applications of Excimer Lasers 389
21.1 Introduction 389
21.2 Technological Advances 390
21.3 High-Repetition-Rate Applications 394
References 401
22 New Frontiers: Extreme-Ultraviolet (EUV) Technology at 13.5nm 402
22.1 Prospects of EUV Lithography Drive the Development of High- Power EUV Sources 402
22.2 Challenges of EUV Lithography 404
22.3 Basic Technology and Requirements for EUV Sources 407
22.4 Gas-Discharge-Produced and Laser- Produced Plasma EUV Sources 409
22.5 GDPP and LPP EUV Sources – State of the Art 415
22.6 Outlook 422
References 424
List of Abbreviations 426
Index 430