Smart Sensor Systems (eBook)

Professor Gerard C. M. Meijer, Electronic Instrumentation Laboratory, Delft University of Technology, the Netherlands Professor Meijer is currently a full professor of the Laboratory of Electronic Instrumentation at Delft University of Technology and since 1972 he has been a member of the Research and Teaching staff of the Faculty of Electrical Engineering. His main areas of research concern smart sensor systems and analog interface electronics. He has performed application-oriented research on sensor-interface circuits and fundamental research on the accuracy of voltage references, integrated temperature sensors, effects of mechanical stress in integrated circuits and the effects at high temperatures in integrated circuits. Professor Meijer chairs the national organization 'Sensorplatform' of the Dutch Technology Foundation STW, and the program 'Autonomous Sensor Systems' a national research program. His work has been published in over 280 papers and he has won numerous awards including 'Simon-Stevin Meester' honouree degree in 1999, and the 'Anthony van Leeuwenhoek' chair at TUdelft in 2001. Contributors: Bernhard Boser, University of California, Berkeley Jan Bosiers, Dalsa, the Netherlands Tim Denison, Medtronic, USA Johan Huijsing, TUDelft, the Netherlands Kofi Makinwa, TUDelft, the Netherlands Michiel Pertijs, Holst Centre, the Netherlands Roland Thewes, Infineon, Germany Tim Tiek, Sensata, the Netherlands Albert Theuwissen, TUDelft, the Netherlands

About the Editors xi

List of Contributors xiii

Preface xv

1 Smart Sensor Design 1
Kofi Makinwa

1.1 Introduction 1

1.2 Smart Sensors 2

1.3 A Smart Temperature Sensor 5

1.4 A Smart Wind Sensor 8

1.5 A Smart Hall Sensor 11

1.6 Conclusions 14

2 Calibration and Self-Calibration of Smart Sensors 17
Michiel Pertijs

2.1 Introduction 17

2.2 Calibration of Smart Sensors 18

2.3 Self-Calibration 27

2.4 Summary and Future Trends 38

3 Precision Instrumentation Amplifiers 42
Johan Huijsing

3.1 Introduction 42

3.2 Applications of Instrumentation Amplifiers 43

3.3 Three-OpAmp Instrumentation Amplifiers 44

3.4 Current-Feedback Instrumentation Amplifiers 46

3.5 Auto-Zero OpAmps and InstAmps 48

3.6 Chopper OpAmps and InstAmps 52

3.7 Chopper-Stabilized OpAmps and InstAmps 56

3.8 Chopper-Stabilized and AZ Chopper OpAmps and InstAmps 62

3.9 Summary and Future Directions 65

4 Dedicated Impedance-Sensor Systems 68
Gerard Meijer, Xiujun Li, Blagoy Iliev, Gheorghe Pop, Zu-Yao Chang, Stoyan Nihtianov, Zhichao Tan, Ali Heidari and Michiel Pertijs

4.1 Introduction 68

4.2 Capacitive-Sensor Interfaces Employing Square-Wave Excitation Signals 71

4.3 Dedicated Measurement Systems: Detection of Micro-Organisms 78

4.4 Dedicated Measurement Systems: Water-Content Measurements 83

4.5 Dedicated Measurement Systems: A Characterization System for Blood Impedance 89

4.6 Conclusions 97

5 Low-Power Vibratory Gyroscope Readout 101
Chinwuba Ezekwe and Bernhard Boser

5.1 Introduction 101

5.2 Power-Efficient Coriolis Sensing 101

5.3 Mode Matching 108

5.4 Force Feedback 119

5.5 Experimental Prototype 133

5.6 Summary 142

6 Introduction to CMOS-Based DNA Microarrays 145
Roland Thewes

6.1 Introduction 145

6.2 Basic Operation Principle and Application of DNA Microarrays 146

6.3 Functionalization 149

6.4 CMOS Integration 150

6.5 Electrochemical Readout Techniques 153

6.6 Further Readout Techniques 165

6.7 Remarks on Packaging and Assembly 169

6.8 Concluding Remarks and Outlook 169

7 CMOS Image Sensors 173
Albert Theuwissen

7.1 Impact of CMOS Scaling on Image Sensors 173

7.2 CMOS Pixel Architectures 175

7.3 Photon Shot Noise 180

7.4 Analog-to-Digital Converters for CMOS Image Sensors 181

7.5 Light Sensitivity 184

7.6 Dynamic Range 186

7.7 Global Shutter 187

7.8 Conclusion 188

8 Exploring Smart Sensors for Neural Interfacing 190
Tim Denison, Peng Cong and Pedram Afshar

8.1 Introduction 190

8.2 Technical Considerations for Designing a Dynamic Neural Control System 192

8.3 Predicate Therapy Devices Using Smart-Sensors in a Dynamic Control Framework: Lessons Derived from Closed-Loop Cardiac Pacemakers 195

8.4 The Application of "Indirect" Smart Sensing Methods: A Case Study of Posture Responsive Spinal Cord Stimulation for Chronic Pain 198

8.5 Direct Sensing of Neural States: A Case Study in Smart Sensors for Measurement of Neural States and Enablement of Closed-Loop Neural Systems 207

8.6 Future Trends and Opportunities for Smart Sensing in the Nervous System 231

9 Micropower Generation: Principles and Applications 237
Ruud Vullers, Ziyang Wang, Michael Renaud, Hubregt Visser, Jos Oudenhoven and Valer Pop

9.1 Introduction 237

9.2 Energy Storage Systems 240

9.3 Thermoelectric Energy Harvesting 246

9.4 Vibration and Motion Energy Harvesting 253

9.5 Far-Field RF Energy Harvesting 262

9.6 Photovoltaic 268

9.7 Summary and Future Trends 268

References 270

Index 275