Resonant MEMS (eBook)

Oliver Brand received his diploma degree in Physics from Technical University Karlsruhe, Germany, in 1990 and his PhD degree from ETH Zurich, Switzerland, in 1994. From 1995 to 1997, he worked as a postdoctoral fellow at Georgia Tech. From 1997 to 2002, he was a lecturer at ETH Zurich and deputy director of the Physical Electronics Laboratory. In 2003, he joined the Electrical and Computer Engineering faculty at the Georgia Institute of Technology where he is currently a Professor. Since 2014, he serves as the Executive Director of Georgia Tech?s Institute for Electronics andNanotechnology.He has co-authoredmore than 190 publications in scientific journals and conference proceedings. He is a co-editor of the Wiley-VCH book series Advanced Micro & Nanosystems, a member of the editorial board of Sensors and Materials, and has served as General Co-Chair of the 2008 IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008). Dr. Brand is a senior member of the IEEE and a co-recipient of the 2005 IEEE Donald G. Fink Prize Paper Award. His research interests are in the areas of silicon-based microsystems, microsensors, MEMS fabrication technologies, and microsystem packaging. Isabelle Dufour graduated from Ecole Normale Supérieure de Cachan in 1990 and received her PhD and HDR degrees in engineering science from the University of Paris-Sud, Orsay, France, in 1993 and 2000, respectively. She was a CNRS research fellow from 1994 to 2007, first in Cachan working on the modeling of electrostatic actuators (micromotors, micropumps) and then after 2000 in Bordeaux working on microcantilever-based chemical sensors. She is currently a Professor of electrical engineering at the University of Bordeaux, and her research interests are in the areas of microcantilever-based sensors for chemical detection, rheological measurements, material characterization, and energy harvesting. Stephen M. Heinrich earned the BS degree summa cum laude from Penn State in 1980 and the MS and PhD degrees from the University of Illinois at Urbana-Champaign in 1982 and 1985, all in civil engineering. Hired as an Assistant Professor at Marquette University in 1985, he was promoted to his current rank of Professor in 1998. In 2000, Prof. Heinrich was awarded the Rev. John P. Raynor Faculty Award for Teaching Excellence, Marquette?s highest teaching honor, while in 2006 he was a awarded a Fulbright Research Scholar Award to support research collaboration at the Université de Bordeaux. Dr. Heinrich?s research has focused on structural mechanics applications in microelectronics packaging and analytical modeling of cantilever-based chemical/biosensors and, more recently, MEMS energy harvesters. The investigations performed by Dr. Heinrich and his colleagues have resulted in more than 100 refereed publications and three best paper awards from IEEE and ASME. His professional service activities include membership on the ASCE Elasticity Committee, Associate Editor positions for the IEEE Transactions on Advanced Packaging and the ASME Journal of Electronic Packaging, and technical review activities for more than 40 journals, publishers, and funding agencies. Fabien Josse received the MS and PhD degrees in Electrical Engineering from the University of Maine in 1979 and 1982, respectively. He has been with Marquette University, Milwaukee, WI, since 1982 and is currently Professor of Electrical, Computer and Biomedical Engineering. He is also an Adjunct Professor with theDepartment of Electrical Engineering, Laboratory for Surface Science and Technology, University of Maine. He has been a Visiting Professor with the University of Heidelberg, Germany, the Laboratoire IMS, University of Bordeaux, France, and the Physical Electronics Laboratory, ETH Zurich, Switzerland, and IMTEK, University of Freiburg, Germany. His research interests include solid state sensors, acoustic wave sensors, and MEMS devices for liquid-phase biochemical sensor applications, investig

PART I. FUNDAMENTALS
Fundamental Theory of Resonant MEMS Devices
Frequency Response of Cantilever Beams Immersed in Viscous Fluids
Damping in Resonant MEMS
Parametrically-Excited Micro- and Nanosystems
Finite Element Modeling of Resonators

PART II. IMPLEMENTATION
Capacitive Devices
Piezoelectric Resonant MEMS
Resonant MEMS Electrothermal Excitation
Nanoelectromechanical Systems (NEMS)
Organic Resonant MEMS Devices
Devices with Embedded Channels
Hermetic Packaging for Resonant MEMS
Compensation, Tuning and Trimming of MEMS Resonators

PART III. APPLICATIONS
MEMS Inertial Sensors
Resonant MEMS Chemical Sensors
Biosensors
Fluid Properties Sensors
Energy Harvesting Devices
PART I. FUNDAMENTALS
Fundamental Theory of Resonant MEMS Devices
Frequency Response of Cantilever Beams Immersed in Viscous Fluids
Damping in Resonant MEMS
Parametrically-Excited Micro- and Nanosystems
Finite Element Modeling of Resonators

PART II. IMPLEMENTATION
Capacitive Devices
Piezoelectric Resonant MEMS
Resonant MEMS Electrothermal Excitation
Nanoelectromechanical Systems (NEMS)
Organic Resonant MEMS Devices
Devices with Embedded Channels
Hermetic Packaging for Resonant MEMS
Compensation, Tuning and Trimming of MEMS Resonators

PART III. APPLICATIONS
MEMS Inertial Sensors
Resonant MEMS Chemical Sensors
Biosensors
Fluid Properties Sensors
Energy Harvesting Devices